工業氦氣Industrial Helium
技術指標:表中“純度”和“含量”均為體積分數(%) “Puity”and“Content”in table are expressed as volume fraction(%)
項目Ltem |
指標 Value |
氦氣純度He Purity |
10-2≥ |
99 |
氖、氫、氧、氬、氮、甲烷含量 |
10-2≤ |
Total content of Ne、H2、O2、Ar、N2 and CH4 | |
1 |
露點,Dew point |
℃ ≤ |
-43 |
純氦 Purity helium
技術指標:表中“純度”和“含量”均為體積分數(%)
“Puity”and“Content”in table are expressed as volume fraction(%)
項目 Ltem |
指標 Value |
優等品 Class A (Excellent) |
一等品Class B(Good) |
合格品 Class C(Pass) |
氦氣純度 He Purity |
10-2 |
≥ |
99.995 |
99.993 |
99.99 |
氖含量 Ne content |
10-6 |
≤ |
15 |
25 |
40 |
氫含量H2 content |
10-6 |
≤ |
3 |
5 |
7 |
氧含量O2 content |
10-6 |
≤ |
3 |
5 |
7 |
氮含量 N2 content |
10-6 |
≤ |
10 |
17 |
25 |
一氧化碳含量 CO content |
10-6 |
≤ |
1 |
1 |
1 |
二氧化碳含量 CO2 content |
10-6 |
≤ |
1 |
1 |
1 |
甲烷含量 CH4 content |
10-6 |
≤ |
1 |
1 |
1 |
水份含量H2O content |
10-6 |
≤ |
10 |
15 |
20 |
高純氦 High-purity helium
技術指標:表中“純度”和“含量”均為體積分數(%)
“Puity”and“Content”in table are expressed as volume fraction(%)
項目 Ltem |
指標 Value |
優等品 Class A (Excellent) |
一等品Class B(Good) |
合格品Class C(Pass) |
氦氣純度He Purity 10-2 ≥ |
99.996 |
99.9993 |
99.999 |
氖含量 Ne content10-6 ≤ |
1 |
2 |
3 |
氫含量H2 content 10-6 ≤ |
0.1 |
0.5 |
1 |
氧含量O2 content 10-6 ≤ |
0.5 |
1 |
1 |
氮含量 N2 content 10-6 ≤ |
1 |
1 |
2 |
一氧化碳含量 CO content 10-6 ≤ |
0.1 |
0.2 |
0.5 |
二氧化碳含量 CO2 content 10-6 ≤ |
0.2 |
0.2 |
0.5 |
甲烷含量 CH4 content 10-6 ≤ |
0.1 |
0.2 |
0.5 |
水份含量H2O content 10-6 ≤ |
1 |
2 |
3 | |